Particle Measuring

KS-41A Particle Counter

The KS-41A scattered light particle counter enables for the first time the counting and size classification of 150 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersion lithography and for high-noise applications.

Sophisticated calibration concepts document the extremely high counting efficiency of the system.

  • Smallest channel 150 nm
  • Suitable for photoresists, SOC / SOG, ARC and other polymeric compounds
  • Integrated PHA (Pulse Height Analyzer) and selectable size channels
  • Suitable for high-noise products
  • Max 10 particle channels in the range between 0.1 and 0.5 μm
  • Suitable for continuous online operation
  • Suitable for batch operation
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