Particle Measuring

KS-41B Particle Counter

The KS-41B particle counter allows for the first time the counting and size classification of 70 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersions lithography.

Sophisticated calibration concepts document the extremely high counting efficiency of the system.

  • Smallest channel 100 nm, (optional from 0.07 μm)
  • Suitable for photoresist, SOC / SOG, ARC and other polymeric compounds,
  • Max 10 particle channels in the range between 0.1 and 0.5 μm (optional from 0.07 μm)
  • Suitable for continuous online operation
  • Suitable for batch operation
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