Critical Environment In-tool Blower 5822i
5822i Blower is designed to meet small-footprint ionizer requirements in automated process tools, offering exceptional performance in hard disk drive manufacturing and back-end semiconductor environments. The ionizer maintains a ±3V or better balance standard and exceptional ±1V with the optional external feedback system. An internal, automatic balance correction system ensures your target is ionized accurately, presenting significant reduction in calibration and maintenance time resulting in cost savings.
- ±3V or better balance (±1V with the Novx System)
- Facility Monitoring System (FMS) connection and audible alarm
- Separate control box
- Cleanliness rated at ISO 14644 Class 4 (Fed. Std. 209e Class 10)
- Schnellere Reaktion auf Ionisierungsfehler mit Benachrichtigung über FMS
Specifications
| Input Voltage | 24 VDC @ 1A from external power supply (100-240 VAC 50/60 Hz) or from tool power |
| Discharge | Between 2-2.5 sec @ 12” (30.5 cm) (typ) Measured in-line from the center of the fan (±1000V-100V) |
| Balance | ±3V or better; ±1V with the Novx System |
| Ion Emission | Steady-state DC Technology |
| Emitter | Tungsten, 8 per blower; Titanium optional |
| Cleanroom Class | ISO 14644-1 Class 4 |
| LED Indicator | Control Box: green POWER ON, red ALARM |
| Control | Balance adjust, sensor gain adjust, fan “slow/off/fast” switch, variable “slow” fan speed |
| Airflow | 20.5 cfm (typ) |
| Audible Noise | <56 dB, typical measurements taken 12” (30.5 cm) from fan |
| Operating Env | 50-95°F (10-35°C); 30-65% RH, non-condensing |
| Mounting | 2 mounting screw holes on bottom of blower, 1.20” (3.05 cm) apart |
| Enclosure | Stainless Steel |
| Dimension | Fan Unit: 4.57”H x 3.27”W x 3.47”D (11.6 x 8.31 x 8.81 cm) Control Box: 1.0”H x 5.2”W x 2.35”D (2.54 x 13.2 x 5.97 cm) |
| Weight | Blower 1.14 lb (0.52 kg); Control Box 0.56 lb (0.25 kg) |
| Warranty | Two year limited warranty |