In-tool Micro Blower 5941
Simco-Ion’s Micro Series Blowers are designed for advanced critical environment in-tool applications where space is a constraint. The new 5941 Micro Blower is compactly designed but exceptionally effective in meeting current requirements for advanced automated process tools. Only 4.33” (110 mm) tall and 3.15” (80 mm) wide, this amazing compact in-tool blower offers outstanding performance in back-end semiconductor environments.
- ±3V or better balance
- Compact size
- Cleanliness rated at ISO 14644-1 Class 3
- Facility Monitoring System (FMS) connection
- Auto-clean system
Specifications
| Input Voltage | 24 VDC (±10%), 6W max |
| Discharge | Without Collimator: <4 sec @ 12" (30.5 cm), typ With Collimator: <3 sec @ 12" (30.5 cm), typ |
| Balance | ±3V or better @ 12" (30.5 cm) away Warning Setpoint: +3.5V (±0.5V), -3.5V (±0.5V) Alarm Setpoint: +5.0V (±0.5V), -5.0V (±0.5V) |
| Ion Emission | Steady-state DC Technology |
| Emitter | Tungsten wire, 4 per blower |
| Cleanroom Class | ISO 14644-1 Class 3 |
| LED Indicator | Green NORMAL; blink Orange/Green BALANCE WARNING; blink Red BALANCE ALARM; blink Alt Green/Red FAN STALL; blink Orange EPC ACTIVE |
| Control | Trimpot balance control; Model 5941S: 3 position switch (up = hi-fan, center = off, down = low fan) |
| Airflow | High Fan Speed: 17 cfm Low Fan Speed: 7 cfm (Model 5941S only) |
| Audible Noise | <36 dBA |
| Connector | 2.0 mm barrel connector (24 VDC), RJ-9 for FMS |
| FMS | RJ-9 for fan fault and out of balance alarms |
| Ozone | <0.004 ppm (typ) |
| Operating Env | 50-95°F (10-35°C); 30-70% RH, non-condensing |
| Mounting | U-bracket, factory-installed |
| Enclosure | Collimator |
| Enclosure | ABS |
| Dimension | Without Collimator: 4.33”H x 3.15”W x 1.60”D (11.0 x 8.00 x 4.06 cm) without bracket With Collimator: 4.33”H x 3.15”W x 2.93”D (11.0 x 8.00 x 7.45 cm) without bracket |
| Weight | 0.70 lb (0.32 kg) without Collimator; 0.72 lb (0.33 kg) with Collimator |
| Warranty | Two year limited warranty |