AeroBar Ionizing System 5225
Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Specifications
| Voltage | Input: 24 VAC, 50/60 Hz, 1W (typ); powered by Interface Module Model 5200-IM6T Output: 0-20 kVDC, ±10% for each polarity on an individual AeroBar; positive or negative output levels can be adjusted separately through GUI |
| Output Current | <15 µA, current and voltage limited |
| Control Signal | RS-485 from the Interface Module |
| Regulation | Output and balance stability is achieved by independently regulating the ion emission current of each polarity at each ionizer |
| Timing | Both on and off timing for each polarity are settable from 0-10 sec @ 0.1 sec increments; LEDs on the bar indicate the polarity of the ion emission |
| Ion Emission | Pulse DC, Steady-state DC, or standby |
| Emitter | Single-crystal Silicon or Titanium, replaceable |
| Cleanroom Class | ISO 14644-1 Class 1 (Single-crystal Silicon emitter) ISO 14644-1 Class 3 (Titanium emitter) |
| LED Indicator | Individual red flash ON for each polarity; middle red flashes rapidly when in ALARM, all 3 blink at once when COMMUNICATION occurs; alarm relayed to tool GUI |
| Alarm | Alarm activates when the bar is no longer able to maintain the preset ion output level; alarm is displayed visually by a red LED in the middle of the ionizer chassis as well as on GUI; settable threshold alarm limits for predictive maintenance |
| Connector | RJ-11 modular jack receptacles |
| Ozone | <0.005 ppm |
| EMI | Below background level |
| Maintenance | Annual, semi-annual or quarterly emitter point cleaning depending on process sensitivity and presences of AMCs in environmen |
| Enclosure | ABS plastics, fire retardan |
| Dimension | 2.1”H x 1.2”W x 22.4 / 28.4 / 35.7 / 44.4 / 55.6 / 64.4 / 75.5 / 84.4”L (5.3 x 3.1 x 56.9 / 72.1 / 90.7 / 112.8 / 141.2, 163.6 / 191.8 / 214.4 cm) |
| Weight | 1.13 lb (0.51 kg) for a 22” (55.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30.5 cm) |
| Warranty | Two-year limited warranty |