AeroBar 5635 MP
Simco-Ion's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminate static charge in semiconductors and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.
- Extended ISO Class 1 (10 nm) particles cleanliness
- Modulated pulse technology
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with an easy-to-use interface with wide adjustability
- Alarm output signal
Specifications
| Voltage | Input: 24 VDC ±10% power input RJ-45; 0.7A (max) Output: 13.5 kV p-p (max), adjustabl |
| Discharge | ±1000-100V in 15 sec (typ) with no air-assist, Vp-p Swing of 80 at 24” below an emitter center group of points |
| Balance | <±35V measured in a controlled environment at 18” distance |
| Range | 150-1000 mm distance to surface; application & customer specification dependent |
| Ion Emission | Modulated Pulse (MP) Technology |
| Emitter | Points: ISO 14644-1 Class 1 Single-crystal Silicon Pitch: 50 mm spacing for bars shorter than or equal to 600 mm, 75 mm spacing between nozzles on all other lengths Frequency: Low 0.3-1.5 Hz; high 1-33 Hz |
| Cleanroom Class | ISO 14644-1 (0.1 μm particles) and Extended ISO Class 1* cleanliness (10 nm particles or nanoparticles) using 45-50% output voltage setting and OpenJet nozzles with Single crystal Silicon emitters |
| Air Supply | Input: Clean Dry Air (CDA) or Nitrogen Pressure: 45 psi max Flow: 1-3.5 lpm/nozzle Connection: 8 mm OD one-touch fitting |
| Bar Setting | DIP switches for general power settings; trimpots for fine tuning balance, frequency, & power output; or use the serial output to the 5635 Bar MP Control software for fine adjustments |
| Ozone | <0.05 ppm (24-hour accumulation) |
| EMI | Below background level |
| Operating Env | 15-35°C (59-95°F); 30-60% RH, non-condensing |
| Enclosure | ABS chassis (ground plate – carbon filled ABS) |
| Dimension | 3.1”H x 1.3”W x 13.8 / 17.7 / 23.6 / 33.5 / 39.3 / 45.3 / 51.2 / 57.1 / 63.0 / 69.0 / 74.8 / 80.7 / 86.6 / 92.5”L (7.8 x 3.4 x 35 / 45 / 60 / 85 / 100 / 115 / 130 / 145 / 160 / 175 / 190 / 205 / 220 / 235 cm) |