AeroBar 5645 with Feedback Control
Simco-Ion’s latest Modulated Pulse (MP) Technology ionization bar is now available with active monitoring and feedback control through the Novx System and Novx Inside versions. The 5645 MP bar is designed to provide industry-leading balanced ionization performance for semiconductor back-end advanced packaging and test applications and front-end demanding ultra-clean applications for fast discharge time, low swing voltages, and precision balance. This advanced technology enables AeroBar mounting within 150 mm of the wafer. Precision adjustment combined with ultra-clean silicon emitter points, the 5645 MP bar exceeds ISO 14644-1 Class 1 cleanliness and meets the Extended ISO Class 1 level for particles down to 10 nm.
Specifications
| Voltage | Input: 24 VDC ±10%, 0.7A (max) Output: 13.5 kV peak-to-peak (max) |
| Discharge | 15 sec (typ) with no air-assist measured @ 24” (61.0 cm) below AeroBar center |
| Balance | <±5V, Novx System or Novx Inside; <±20V, Standalone |
| Ion Emission | Modulated Pulse (MP) Technology |
| Emitter | Point: Titanium Voltage: 13.5 kV peak-to-peak (max) Frequency: 0.3-60 Hz Pitch: 50 mm spacing (350/450/600 mm lengths only); 75 mm spacing between nozzles on all other lengths |
| Cleanroom Class | ISO 14644-1 Class 3 |
| LED Indicator | Green steady NORMAL operation, green flashing STANDBY, red ALARM |
| Bar Setting | Adjustment made remotely via software controlled with Model 5601 Power Distribution Box; no manual adjustment on the bar |
| Air Supply | Input: Optional Clean Dry Air (CDA) or Nitrogen Flow: OpenJet 45 psi max gas pressure, 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting Connection: 8 mm tubing (OD) bulkhead, one-touch fitting; no daisy-chain capability |
| Ozone | <0.05 ppm |
| EMI | Below background level |
| Operating Env | 15-35°C (59-95°F); 30-60% RH, non-condensing |
| Enclosure | ABS chassis, stainless steel rail on the outside of the bar |
| Dimension | 3.1”H x 1.3”W x 13.8/17.7/23.6/33.5/39.3/45.3/51.2/57.1/63.0/69.0/74.8/80.7/86.6/ 92.5”L (7.8 x 3.4 x 35/45/60/85/100/115/130/145/160/175/190/205/220/235 cm) |