KS-19F – Particle measurement in ultra-pure chemistry
The KS-19F particle counter allows for the first time the counting and size classification of 30 nm particles in ultra-pure chemistry. It is also the only high-end liquid particle counter, which is equally suitable for the monitoring of ultra-pure particle and ultrapure water.
Sophisticated calibration concepts document the extremely high counting efficiency of the system.
- Smallest channel 30 nm
- Suitable for the most aggressive chemistry; Also hydrofluoric acid
- Max 10 particle channels in the range between 30 and 130 nm
- Suitable for continuous online operation
- Suitable for batch operation
Specifications
| Optical system | Light-scattering method |
| Light source | Diode pumped solid state laser (wavelength 532 nm, rated output 800 mW) |
| Laser product class | Class 1, IEC 60825-1 |
| Light detector | Silicon photodiode |
| Materials of parts exposed to sample | Sapphire, PFA |
| Calibration | Polystyrene latex (PSL) particles with refractive index 1.6 in pure water |
| Size range | 0.03 μm to 0.13 μm Freely settable 2 to 10 channels can be set with controller |
| Flow rate | 10 mL/min |
| Counting efficiency | 5 % ±1.5 % |
| Maximum particle number concentration | 40 000 particles/mL (coincidence loss is 10 % or less) |
| Sample pressure range | 300 kPa or less (gauge pressure) |
| Sample inlet / outlet | φ2 mm x φ4 mm flared joint for tube |
| Purge air port | One - touch type joint for φ6 mm tube |
| Controller | For connection of KE-40B1 |
| Liquid leak alarm | Alarm output terminal shorted during normal operation, connector open when internal leak is detected |
| Environmental conditions for operation | 15 °C to 35 °C, less than 80 %RH (no condensation) |
| Power | DC12 V (supplied from KE-40B1) |
| Dimensions and weight | 170 mm (H) x 487 mm (W) x 310 mm (D) (excluding protruding parts), approx. 13.5 kg |
| Supplied Accessories | Tube A vacuum pack x 1 (φ2 mm x φ4 mm, Flared PFA tube 1.5 m x 2, union joint x 1), Connection cable A (1 m) x 1 |