KS-20F Particle counter with light scattering detector
The KS-20F light-scattering particle counter is designed for counting and sizing particles in liquids within the 20 nm to 80 nm range. As a high-end liquid particle counter, it is uniquely suitable for monitoring particles in both ultra-pure water (UPW) and high-purity chemicals. Its robust construction and versatility make the KS-20F ideal for applications involving aggressive chemicals such as hydrofluoric acid, sulfuric acid, ammonium hydroxide, and hydrogen peroxide, making it an indispensable solution for particle monitoring in demanding chemical industry environments. The device is also capable of measuring EUV photoresists. Equipped with an integrated leak sensor, the KS-20F triggers an alarm if a leak is detected, ensuring operator safety during chemical measurements. With a relatively high counting efficiency of 3% and a low zero-count rate, it provides essential performance for monitoring particles in UPW systems. Advanced calibration concepts further enhance the system’s exceptional accuracy and reliability. The KS-20F can be seamlessly integrated into existing process control systems via an Ethernet interface, or alternatively through a 4–20 mA interface and alarm relay. Suitable for both continuous online operation and batch measurements, the KS-20F offers a flexible solution for particle monitoring across a wide range of applications, combining precision, reliability, and adaptability in critical high-purity and chemical processing environments.
Specifications
| Optical system | Light-scattering method |
| Light source | Diode pumped solid statelaser (wavelength 532 nm, ratedoutput 1.5 W) |
| Laser product class | Class 1,IEC 60825-1 |
| Light detector | Silicon photodiode |
| Materials of parts exposed to sample | Sapphire, PFA |
| Calibration | Polystyrene latex (PSL)particles with refractive index 1.6in pure water |
| Setting range | 0.02μm to 0.08 μm Freely settable 2 to 7 channels can be set with controller |
| Factory default (4channels) | 0.02 μm, 0.03 μm, 0.04 μm, 0.06 μm |
| Flow rate | 10 mL/min |
| Counting efficiency | 3% |
| Maximum particle number concentration | 50 000 particles/mL (coincidence loss is 10%or less) |
| Sample pressure range | 300 kPa or less (gauge pressure) |
| Sample inlet/outlet | φ2 mm x φ4 mm flared joint for tube |
| Purge air port | One-touch type joint for φ6 mm tube |
| CONTROLLER | For connection of KE-40B1 |
| LIQUID LEAK ALARM | Alarm output terminal shorted during normal operation, connector open when internal leak is detected |
| Environmental conditions for operation | 15°C to 35°C,less than 80 %RH (no condensation) |
| Power | 100 to 240 V AC,50/60 Hz,Approx.250VA |
| Dimensions and weight | 235 mm (H) x 552 mm (W) x 340 mm (D) (excluding protruding parts), approx. 18 kg |
| Supplied Accessories | Tube A vacuum pack x 1 (φ2 mm x φ4 mm, Flared PFA tube 1.5 m x 2, union joint x1), Connection cableA (1m) x 1,Power cordx 1 |
| Option | Connection cable (2 m) KS-42-126 |