KS-41A Particle Counter
The KS-41A light-scattering particle counter is a high-precision instrument designed for counting and sizing particles ranging from 150 nm to 0.5 µm in polymer solutions such as photoresists, SOG, ARC, and other specialized compounds. This high-end device has been specifically developed for immersion lithography and high-noise applications where exceptional measurement accuracy is required. Leveraging advanced calibration concepts, the KS-41A delivers outstanding performance and reliability even in the most demanding operational environments. The instrument features selectable particle size channels and an integrated pulse height analyzer (PHA), allowing precise differentiation and classification of particles. Suitable for both continuous online operation and batch measurements, the KS-41A can measure up to 10 particle channels within the 0.15 µm to 0.5 µm range. This flexibility makes it an ideal solution for production monitoring, process control, and quality assurance in microelectronics and other high-tech industries. The KS-41A combines robustness, precision, and versatility, providing reliable and repeatable particle measurements in complex, highly sensitive environments, making it the preferred choice for applications demanding exacting particle analysis and superior operational performance.
Specifications
| Optical system | Light-scattering method |
| Light source | Laser diode (wavelength 830 nm, rated output 200 mW) |
| Laser product class | Class 1, IEC 60825-1 |
| Light detector | PIN type photodiode |
| Materials of parts exposed to sample | Synthetic quartz, PFA |
| Allowable sample type | Fluids which do not corrode the fluid contact materials |
| Calibration | Polystyrene latex (PSL) particles (refractive index 1.6) in pure water |
| 4 channels (factory default) | ≥0.15μm, ≥0.2μm, ≥0.3μm, ≥0.5μm |
| User selectable channels | 1 to 10 channels, setting made from Controller |
| Setting range | 0.15μm to 0.5μm |
| Counting efficiency | 50 ±10 % |
| Flow rate | 10 mL/min |
| Maximum particle number concentration | 1200 particles/mL (at 5 % coincidence loss for 0.15μm particles) |
| Sample pressure range | 300 kPa (gauge pressure) or less |
| Sample inlet/outlet | 2 (dia.) x 4 (dia.) flared joint for tube |
| Purge air port | Rc 1/8 (1/8 PT female screw) |
| CONTROLLER connector | Connecting to KE-40B1 |
| LIQUID LEAK/ALARM connector | Alarm output terminal shorted during normal operation, open when internal leak is detected |
| Power | DC12 V (supplied by KE-40B1 or KZ-51) |
| Environmental conditions for operation | 15 °C to 30 °C, less than 85 % RH (no condensation) |
| Dimensions and weight | 160 (H) x 300 (W) x 251 (D) mm (excluding protruding parts), Approx. 7.5 kg |
| Accessories | Tube A vacuum pack x 1 (2 x 4 dia. PFA tube with flared joint at one end, 1.5 m x 2, Union joint x 1) Cleaning brush set x 1, Connection cable A (1 m) x 1 |
| Option | Connection cable B (5 m) KS-42-123 |