KS-41B Particle Counter
The KS-41B light-scattering particle counter is specifically designed for counting and sizing particles from 70 nm in photoresists, SOG, ARC, and other polymer solutions. It is a high-end liquid particle counter tailored for immersion lithography applications, where the highest levels of purity and measurement accuracy are required. Utilizing advanced calibration concepts, the KS-41B delivers high performance and stable measurement quality, even under demanding process conditions. The smallest standard channel begins at 100 nm, with an optional range starting at 70 nm, enabling precise detection of the finest particles. With up to 10 selectable particle channels in the 0.1–0.5 µm range (optionally from 0.07 µm), the system provides significant flexibility for diverse analytical requirements. The KS-41B supports both continuous online operation and batch measurement modes and can be seamlessly integrated into existing process control or quality assurance systems. These features make the KS-41B an optimal solution for high-sensitivity applications in semiconductor manufacturing, where accurate monitoring of the smallest particle sizes is critical.
Specifications
| Optical system | Light-scattering method |
| Light source | Diode pumped solid state laser (wavelength 532 nm, rated output 500 mW) |
| Laser product class | Class 1, IEC 60825-1 |
| Light detector | Multi-channel silicon photodiode |
| Materials of parts exposed to sample | Synthetic quartz, PFA |
| Calibration | Polystyrene latex (PSL) particles (refractive index 1.6) in pure water |
| 5 channels (factory default) | ≥0.1μm, ≥0.15μm, ≥0.2μm, ≥0.3μm, ≥0.5μm |
| User selectable particle size | 1 to 10 channels, setting made from Controller |
| Setting range | 0.1μm to 0.5μm |
| Counting efficiency | 50 ±10 % |
| Sample flow rate | 5 mL/min |
| Maximum particle number concentration | 9 600 particles/mL (coincidence loss 10 %) |
| Sample pressure range | 300 kPa (gauge pressure) or less |
| Sample inlet/outlet | 2 mm (dia.) x 4 mm (dia.) flared joint for tube |
| Purge air port | One-touch type joint for dia. 6 mm tube |
| CONTROLLER connector | Connects to KE-40B1 or KZ-51 |
| LIQUID LEAK/ALARM connector | Alarm output terminal shorted during normal operation, open when internal leak is detected |
| Power | DC12 V (supplied by KE-40B1 or KZ-51) |
| Environmental conditions for operation | 15 °C to 30 °C, less than 80 % RH (no condensation) |
| Dimensions and weight | 164 (H) x 464 (W) x 305 (D) mm (excluding protruding parts), Approx. 12.5 kg |
| Accessories | Tube A vacuum pack x 1 (2 mm x 4 mm dia. PFA tube with flared joint at one end, 1.5 m x 2, Union joint x 1), Cleaning brush set B x 1, Connection cable A (1 m) x 1 |
| Option | Connection cable (2 m) KS-42-126 |