KS-41B Particle Counter

The KS-41B particle counter allows for the first time the counting and size classification of 70 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersions lithography.

Sophisticated calibration concepts document the extremely high counting efficiency of the system.

Smallest channel 100 nm, (optional from 0.07 μm)
Suitable for photoresist, SOC / SOG, ARC and other polymeric compounds,
Max 10 particle channels in the range between 0.1 and 0.5 μm (optional from 0.07 μm)
Suitable for continuous online operation
Suitable for batch operation