The KS-41A scattered light particle counter enables for the first time the counting and size classification of 150 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersion lithography and for high-noise applications.
Sophisticated calibration concepts document the extremely high counting efficiency of the system.
Copyright 2017 PMT | PMT (GB) Ltd. | Willow End Park | Danemore, Malvern | Worcestershire WR13 6NN | UK | Tel: +44 (0)1684 312950 | Fax:+44 (0)1684 312969 | email: info(at)pmtgb.com